Practical Determination of Spatial Resolution in Atom Probe Tomography

TF Kelly; E Voelkl; BP Geiser

doi:10.1017/S1431927609098717

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

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Shimizu, Yasuo Kawamura, Yoko Uematsu, Masashi Itoh, Kohei M. Tomita, Mitsuhiro Sasaki, Mikio Uchida, Hiroshi and Takahashi, Mamoru 2009. Atom probe microscopy of three-dimensional distribution of silicon isotopes in Si28∕Si30 isotope superlattices with sub-nanometer spatial resolution. Journal of Applied Physics, Vol. 106, Issue. 7,

Larson, David J. Prosa, Ty J. Ulfig, Robert M. Geiser, Brian P. and Kelly, Thomas F. 2013. Local Electrode Atom Probe Tomography. p. 109.

Beleggia, M. Kasama, T. Larson, D. J. Kelly, T. F. Dunin-Borkowski, R. E. and Pozzi, G. 2014. Towards quantitative off-axis electron holographic mapping of the electric field around the tip of a sharp biased metallic needle. Journal of Applied Physics, Vol. 116, Issue. 2,

Miller, Michael K. and Forbes, Richard G. 2014. Atom-Probe Tomography. p. 259.

Khan, Mansoor Ali Ringer, Simon P. and Zheng, Rongkun 2016. Atom Probe Tomography on Semiconductor Devices. Advanced Materials Interfaces, Vol. 3, Issue. 12,

Gault, Baptiste 2016. A Brief Overview of Atom Probe Tomography Research. Applied Microscopy, Vol. 46, Issue. 3, p. 117.

Kelly, Thomas F. 2019. Springer Handbook of Microscopy. p. 715.

De Geuser, Frédéric and Gault, Baptiste 2020. Metrology of small particles and solute clusters by atom probe tomography. Acta Materialia, Vol. 188, Issue. , p. 406.

Kühbach, Markus Kasemer, Matthew Gault, Baptiste and Breen, Andrew 2021. Open and strong-scaling tools for atom-probe crystallography: high-throughput methods for indexing crystal structure and orientation. Journal of Applied Crystallography, Vol. 54, Issue. 5, p. 1490.

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Practical Determination of Spatial Resolution in Atom Probe Tomography

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