Hostname: page-component-78c5997874-v9fdk Total loading time: 0 Render date: 2024-11-19T12:15:42.340Z Has data issue: false hasContentIssue false
  • English
  • Français

Planarization Processes for Pre-FIB Sample Preparation

Published online by Cambridge University Press:  01 August 2002

T.-C. Lee ,
J.-Y. Huang ,
L.-C. Chen  and
D. H.-I. Su
T.-C. Lee
Affiliation:
Process Failure Analysis Department, Taiwan Semiconductor Manufacturing Company, Ltd., Taiwan, R.O.C.
J.-Y. Huang
Affiliation:
Process Failure Analysis Department, Taiwan Semiconductor Manufacturing Company, Ltd., Taiwan, R.O.C.
L.-C. Chen
Affiliation:
Process Failure Analysis Department, Taiwan Semiconductor Manufacturing Company, Ltd., Taiwan, R.O.C.
D. H.-I. Su
Affiliation:
Process Failure Analysis Department, Taiwan Semiconductor Manufacturing Company, Ltd., Taiwan, R.O.C.

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 564 - 565
Copyright
Copyright © Microscopy Society of America 2002