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Physical and electrical characterization of the interface between atomic-layer-deposited Al2O3 on GaAs substrates for CMOS applications

Published online by Cambridge University Press:  03 August 2008

DI Garcia-Gutierrez ,
V Kaushik ,
D Shahrjerdi  and
S Banerjee
DI Garcia-Gutierrez
Affiliation:
ATDF
V Kaushik
Affiliation:
ATDF
D Shahrjerdi
Affiliation:
University of Texas, Austin
S Banerjee
Affiliation:
University of Texas, Austin
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 446 - 447
Copyright
© 2008 Microscopy Society of America

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