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A Parallel Radial Mirror Energy Analyzer Attachment for the Scanning Electron Microscope

Published online by Cambridge University Press:  28 September 2015

Kang Hao Cheong ,
Weiding Han ,
Anjam Khursheed  and
Karuppiah Nelliyan
Kang Hao Cheong
Affiliation:
National University of Singapore, Department of Electrical and Computer Engineering, 4 Engineering Drive 3, Singapore 117576, Singapore, [email protected]
Weiding Han
Affiliation:
National University of Singapore, Department of Electrical and Computer Engineering, 4 Engineering Drive 3, Singapore 117576, Singapore, [email protected]
Anjam Khursheed
Affiliation:
National University of Singapore, Department of Electrical and Computer Engineering, 4 Engineering Drive 3, Singapore 117576, Singapore, [email protected]
Karuppiah Nelliyan
Affiliation:
National University of Singapore, Department of Electrical and Computer Engineering, 4 Engineering Drive 3, Singapore 117576, Singapore, [email protected]

Abstract

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Type
Energy Spectrometers
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 142 - 147
Copyright
Copyright © Microscopy Society of America 2015 

References

[1]Khursheed, A, Hoang, HQ & Srinivasan, A, J. Electron. Spectrosc 184 (2012). p 525.CrossRefGoogle Scholar
[2]Jacka, M, et al, Rev. Sci. Instrum. 70 (1999). p 2282.CrossRefGoogle Scholar
[3] Lorentz-2EM/3EM, Integrated Engineering Software Inc., Canada, 2011.Google Scholar
[4] The authors acknowledge funding under the Singapore Government MOE 2011-T2-2-108.Google Scholar