Hostname: page-component-586b7cd67f-rcrh6 Total loading time: 0 Render date: 2024-11-26T03:48:09.092Z Has data issue: false hasContentIssue false
  • English
  • Français

Optimized Detection Limits in FIB-SIMS by Using Reactive Gas Flooding and High Performance Mass Spectrometers

Published online by Cambridge University Press:  27 August 2014

T. Wirtz ,
D. Dowsett  and
P. Philipp
T. Wirtz
Affiliation:
Department “Science and Analysis of Materials” (SAM), Centre de Recherche Public – Gabriel Lippmann, 41 rue du Brill, L-4422 Belvaux, Luxembourg
D. Dowsett
Affiliation:
Department “Science and Analysis of Materials” (SAM), Centre de Recherche Public – Gabriel Lippmann, 41 rue du Brill, L-4422 Belvaux, Luxembourg
P. Philipp
Affiliation:
Department “Science and Analysis of Materials” (SAM), Centre de Recherche Public – Gabriel Lippmann, 41 rue du Brill, L-4422 Belvaux, Luxembourg

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 308 - 309
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Philipp, P., et al. Int. J. Mass. Spectrom. 253 2006) 71.Google Scholar
[2] Wirtz, T., et al. Appl. Phys. Lett. 101 2012) 041601.Google Scholar
[3] Pillatsch, L., et al. Appl. Surf. Sei. 282 2013) 908.Google Scholar