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Optimized Detection Limits in FIB-SIMS by Using Reactive Gas Flooding and High Performance Mass Spectrometers

Published online by Cambridge University Press:  27 August 2014

T. Wirtz ,
D. Dowsett  and
P. Philipp
T. Wirtz
Affiliation:
Department “Science and Analysis of Materials” (SAM), Centre de Recherche Public – Gabriel Lippmann, 41 rue du Brill, L-4422 Belvaux, Luxembourg
D. Dowsett
Affiliation:
Department “Science and Analysis of Materials” (SAM), Centre de Recherche Public – Gabriel Lippmann, 41 rue du Brill, L-4422 Belvaux, Luxembourg
P. Philipp
Affiliation:
Department “Science and Analysis of Materials” (SAM), Centre de Recherche Public – Gabriel Lippmann, 41 rue du Brill, L-4422 Belvaux, Luxembourg

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 308 - 309
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Philipp, P., et al. Int. J. Mass. Spectrom. 253 2006) 71.Google Scholar
[2] Wirtz, T., et al. Appl. Phys. Lett. 101 2012) 041601.Google Scholar
[3] Pillatsch, L., et al. Appl. Surf. Sei. 282 2013) 908.Google Scholar