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Optimal Specimen Preparation for Correlative Atom Probe Tomography and Electron Microscopy of Environmentally Sensitive Materials

Published online by Cambridge University Press:  30 July 2021

Cecile Bonifacio ,
Daniel Perea ,
Pawel Nowakowski ,
Mary Ray  and
Paul Fischione
Cecile Bonifacio
Affiliation:
E.A. Fischione Instruments, Inc., United States
Daniel Perea
Affiliation:
EMSL at PNNL, United States
Pawel Nowakowski
Affiliation:
E.A. Fischione Instruments, Inc., United States
Mary Ray
Affiliation:
E.A. Fischione Instruments, Inc., United States
Paul Fischione
Affiliation:
E.A. Fischione Instruments, Inc., United States

Abstract

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Type
Advanced Application of Atom Probe Tomography: Specimen preparation, Instrumentation, and Data analysis
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 2472 - 2474
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Fischione, P.E., Williams, R.E., Genç, A., Fraser, H.L., Dunin-Borkowski, R.E., Luysberg, M., Bonifacio, C.S. and Kovács, A. (2017). A small spot, inert gas, ion milling process as a complementary technique to focused ion beam specimen preparation. Microscopy and Microanalysis, 23(4), 782.CrossRefGoogle ScholarPubMed
Bonifacio, C., Rice, K., Prosa, T., Ray, M., Kelly, T., & Fischione, P. (2018). Removal of Ga implantation on FIB-prepared atom probe specimens using small beam and low energy Ar+ Milling. Microscopy and Microanalysis, 24(S1), 1118-1119. https://doi.org/10.1017/s1431927618006074Google Scholar
Bonifacio, C., Nowakowski, P., Costello, K., Ray, M., Morrison, R., & Fischione, P. (2019). Post-FIB specimen preparation of atom probe specimens under controlled environments for correlative microscopy. Microscopy and Microanalysis, 25(S2), 2554-2555. https://doi.org/10.1017/s1431927619013503CrossRefGoogle Scholar
Perea, D. E., Gerstl, S. S., Chin, J., Hirschi, B., & Evans, J. E. (2017). An environmental transfer hub for multimodal atom probe tomography. Advanced Structural and Chemical Imaging, 3(1), Article ID 12, 6 pages. https://doi.org/10.1186/s40679-017-0045-2CrossRefGoogle ScholarPubMed