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On-Axis Electrode Aberration Correctors for Scanning Electron/Ion Microscopes

Published online by Cambridge University Press:  28 September 2015

A. Khursheed  and
W. K. Ang

Abstract

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Type
Aberration Studies
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 106 - 111
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

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[6] US patent application, U.S. Serial No. 62/041,208..Google Scholar