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Observation of device cross-sectional thin films prepared by FIB using JEM-2500SE, an electron microscope for nano-analysis

Published online by Cambridge University Press:  01 August 2002

N. Endo ,
T. Suzuki ,
E. Okunishi ,
Y. Kondo ,
M. Matsushita  and
M. Osaki
N. Endo
Affiliation:
Application and Research Center, JEOL ltd., 1-2 Musashino 3-Chome, Akishima, Tokyo 196-8558, Japan
T. Suzuki
Affiliation:
Application and Research Center, JEOL ltd., 1-2 Musashino 3-Chome, Akishima, Tokyo 196-8558, Japan
E. Okunishi
Affiliation:
Application and Research Center, JEOL ltd., 1-2 Musashino 3-Chome, Akishima, Tokyo 196-8558, Japan
Y. Kondo
Affiliation:
Electron Optical Division, JEOL ltd., 1-2 Musashino 3-Chome, Akishima, Tokyo 196-8558, Japan
M. Matsushita
Affiliation:
Electron Optical Division, JEOL ltd., 1-2 Musashino 3-Chome, Akishima, Tokyo 196-8558, Japan
M. Osaki
Affiliation:
Electron Optical Division, JEOL ltd., 1-2 Musashino 3-Chome, Akishima, Tokyo 196-8558, Japan

Abstract

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Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 1176 - 1177
Copyright
Copyright © Microscopy Society of America 2002