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A Newly Developed Fib System For Tem Specimen Preparation

Published online by Cambridge University Press:  01 November 2002

T. Kamino ,
T. Yaguchi ,
Y. Kuroda ,
T. Hashimoto ,
T. Ohnishi ,
T. Ishitani ,
K. Umemura  and
K. Asayama
T. Kamino
Affiliation:
Hitachi Science Systems, Ltd., 882 Ichige, Hitachinaka, Ibaraki, 312-8504 Japan
T. Yaguchi
Affiliation:
Hitachi Science Systems, Ltd., 882 Ichige, Hitachinaka, Ibaraki, 312-8504 Japan
Y. Kuroda
Affiliation:
Hitachi Science Systems, Ltd., 882 Ichige, Hitachinaka, Ibaraki, 312-8504 Japan
T. Hashimoto
Affiliation:
Hitachi High-Technologies Corp., 882 Ichige, Hitachinaka, Ibaraki, 312-8504 Japan
T. Ohnishi
Affiliation:
Hitachi High-Technologies Corp., 882 Ichige, Hitachinaka, Ibaraki, 312-8504 Japan
T. Ishitani
Affiliation:
Hitachi High-Technologies Corp., 882 Ichige, Hitachinaka, Ibaraki, 312-8504 Japan
K. Umemura
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185-8601 Japan
K. Asayama
Affiliation:
Semiconductor and Integrated Circuits Division, Hitachi, Ltd., Oume, Tokyo, 198-8512 Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 48 - 49
Copyright
Copyright © Microscopy Society of America 2002