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New processes and modules for improvements in beam chemistry

Published online by Cambridge University Press:  23 November 2012

J. Mulders ,
L. Roussel  and
D. Wall
J. Mulders
Affiliation:
Application Development, FEI Electron Optics BV, Eindhoven, Netherlands
L. Roussel
Affiliation:
Application Development, FEI Electron Optics BV, Eindhoven, Netherlands
D. Wall
Affiliation:
Application Development, FEI Electron Optics BV, Eindhoven, Netherlands
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 618 - 619
Copyright
Copyright © Microscopy Society of America 2012

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