The New Laser assisted Wide Angle Tomographic Atom Probe

L Renaud; P Monsallut; P Benard; P Saliot; G Da Costa; F Vurpillot; B Deconihout

doi:10.1017/S1431927606063410

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

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Koelling, Sebastian Gilbert, Matthieu Goossens, Jozefien Hikavyy, Andriy Richard, Olivier and Vandervorst, Wilfried 2009. High depth resolution analysis of Si/SiGe multilayers with the atom probe. Applied Physics Letters, Vol. 95, Issue. 14,

Koelling, S. Innocenti, N. Schulze, A. Gilbert, M. Kambham, A. K. and Vandervorst, W. 2011. In-situ observation of non-hemispherical tip shape formation during laser-assisted atom probe tomography. Journal of Applied Physics, Vol. 109, Issue. 10,

Kambham, A.K. Mody, J. Gilbert, M. Koelling, S. and Vandervorst, W. 2011. Atom-probe for FinFET dopant characterization. Ultramicroscopy, Vol. 111, Issue. 6, p. 535.

Kambham, Ajay Kumar Kumar, Arul Florakis, Antonios and Vandervorst, Wilfried 2013. Three-dimensional doping and diffusion in nano scaled devices as studied by atom probe tomography. Nanotechnology, Vol. 24, Issue. 27, p. 275705.

Koelling, S. Innocenti, N. Bogdanowicz, J. and Vandervorst, W. 2013. Optimal laser positioning for laser-assisted atom probe tomography. Ultramicroscopy, Vol. 132, Issue. , p. 70.

Chiaramonti, Ann N. Miaja-Avila, Luis Caplins, Benjamin W. Blanchard, Paul T. Diercks, David R. Gorman, Brian P. and Sanford, Norman A. 2020. Field Ion Emission in an Atom Probe Microscope Triggered by Femtosecond-Pulsed Coherent Extreme Ultraviolet Light. Microscopy and Microanalysis, Vol. 26, Issue. 2, p. 258.

Lukyanchuk, A. A. Aleev, A. A. Shutov, A. S. Raznitsyn, O. A. Kirillov, C. E. and Rogozhkin, S. V. 2021. Atom Probe Tomography Data Reconstruction with the Correction on Material Density. Physics of Atomic Nuclei, Vol. 84, Issue. 11, p. 1836.

Stender, Patrick Solodenko, Helena Weigel, Andreas Balla, Irdi Schwarz, Tim Maximilian Ott, Jonas Roussell, Manuel Joshi, Yug Duran, Rüya Al-Shakran, Mohammad Jacob, Timo and Schmitz, Guido 2022. A Modular Atom Probe Concept: Design, Operational Aspects, and Performance of an Integrated APT-FIB/SEM Solution. Microscopy and Microanalysis, Vol. 28, Issue. 4, p. 1168.

Caplins, Benjamin W. Chiaramonti, Ann N. Garcia, Jacob M. Sanford, Norman A. and Miaja-Avila, Luis 2023. Atom probe tomography using an extreme ultraviolet trigger pulse. Review of Scientific Instruments, Vol. 94, Issue. 9,

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The New Laser assisted Wide Angle Tomographic Atom Probe

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