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New Developments and Applications of Electron Beam Absorbed Current in SEM

Published online by Cambridge University Press:  05 August 2019

Grigore Moldovan
Grigore Moldovan*
Affiliation:
point electronic GmbH, Halle, Germany
*
*Corresponding author: [email protected]

Abstract

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Type
Vendor Symposium
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 532 - 533
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Leamy, HJ, J. Appl. Phys. 53 (6) (1982), p. R51.Google Scholar
[2]Goldstein, J et al. , in “Scanning Electron Microscopy and X-Ray Microanalysis”, (Singer, US). DOI 10.1007/978-1-4615-0215-9Google Scholar
[3]Smith, CA et al. , IEE Transactions on Electron Devices, ED-33 (2) (1986), p. 282.Google Scholar
[4]The author acknowledges design of EBAC electronics by Wolfgang Joachimi and Uwe Grauel.Google Scholar