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A New Detector for Backscattered Helium Ions in the 30 keV Energy Range

Published online by Cambridge University Press:  26 July 2009

S Sijbrandij ,
J Notte ,
B Thompson ,
C Huynh ,
C Sanford  and
L Scipioni
S Sijbrandij
Affiliation:
Carl Zeiss SMT
J Notte
Affiliation:
Carl Zeiss SMT
B Thompson
Affiliation:
Carl Zeiss SMT
C Huynh
Affiliation:
Carl Zeiss SMT
C Sanford
Affiliation:
Carl Zeiss SMT
L Scipioni
Affiliation:
Carl Zeiss SMT

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 220 - 221
Copyright
Copyright © Microscopy Society of America 2009