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A New and Fast Method for the Creation of 3D Micro and Nano Structures

Published online by Cambridge University Press:  26 July 2009

JJL Mulders  and
JS Faber
JJL Mulders
Affiliation:
FEI Electron Optics,Netherlands
JS Faber
Affiliation:
FEI Electron Optics,Netherlands

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 192 - 193
Copyright
Copyright © Microscopy Society of America 2009