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The Neon Gas Field Ion Source - Stability and Lifetime

Published online by Cambridge University Press:  01 August 2010

J Notte
Affiliation:
Carl Zeiss SMT Inc
F Rahman
Affiliation:
Carl Zeiss SMT Inc
SM McVey
Affiliation:
Carl Zeiss SMT Inc
S Tan
Affiliation:
Intel Corporation
R Livengood
Affiliation:
Intel Corporation

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2010