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THE NANOWORKBENCH: Automated Nanorobotic System Inside of Scanning Electron or Focused Ion Beam Microscopes

Published online by Cambridge University Press:  09 October 2013

I. Burkart
Affiliation:
V. Klocke
Affiliation:
E. Maynicke
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2013