Hostname: page-component-586b7cd67f-tf8b9 Total loading time: 0 Render date: 2024-11-26T10:35:06.900Z Has data issue: false hasContentIssue false
  • English
  • Français

Nanoscale Strain Mapping in Embedded SiGe Devices by Dual Lens Dark Field Electron Holography and Precession Electron Diffraction

Published online by Cambridge University Press:  23 September 2015

Y. Y. Wang ,
D. Cooper ,
J. Rouviere ,
C.E. Murray ,
N. Bernier  and
J. Bruley
Y. Y. Wang
Affiliation:
IBM Micro-electronics division, 2070 Route 52, Hopewell Junction, NY 12570, USA
D. Cooper
Affiliation:
CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France
J. Rouviere
Affiliation:
CEA, INAC, MINETEC Campus, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France
C.E. Murray
Affiliation:
IBM T. J. Watson Research Center, 1101 Kitchawan Road, Route 134, Yorktown Heights, NY 10598, USA
N. Bernier
Affiliation:
CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France
J. Bruley
Affiliation:
IBM T. J. Watson Research Center, 1101 Kitchawan Road, Route 134, Yorktown Heights, NY 10598, USA

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1963 - 1964
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Hytch, M., Houdellier, F., Hue, F. & Snoeck, E., Nature 453 (2008). p 1086.Google Scholar
[2] Wang, Y.Y., et al., Ultramicroscopy . 101 (2004). p. 63. ; US patent: US 7,015,469 B2 (2006).CrossRefGoogle Scholar
[3] Wang, Y.Y., et al. Ultramicroscopy 124 (2013), p. 117.Google Scholar
[4] Wang, Y.Y., et al., Applied Physics Letters 103 (2013), p. 052104.Google Scholar
[5] Wang, Y.Y., Domenicucci, A. & Bruley, J. Microscopy Today, May (2014), p. 2.Google Scholar
[6] Rouviere, J., et al., Applied Physics Letters 103 (2013), p. 241913.Google Scholar
[7] Wang, Y.Y., et al., Applied Physics Letters 106 (2015), p. 042104.CrossRefGoogle Scholar
[8] Davies, J.H., J. Appl. Mech. 70 (2003), p. 655.CrossRefGoogle Scholar