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Nanoscale Holes Formed by In Situ Thin Film Deposition in a FIB

Published online by Cambridge University Press:  01 August 2004

Andrew M Minor ,
Francis Allen ,
Velimir R Radmilovic ,
Eric A Stach  and
Thomas Schenkel
Andrew M Minor
Affiliation:
Lawrence Berkeley National Laboratory, California
Francis Allen
Affiliation:
Lawrence Berkeley National Laboratory, California
Velimir R Radmilovic
Affiliation:
Lawrence Berkeley National Laboratory, California
Eric A Stach
Affiliation:
Lawrence Berkeley National Laboratory, California
Thomas Schenkel
Affiliation:
Lawrence Berkeley National Laboratory, California
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 1118 - 1119
Copyright
© 2004 Microscopy Society of America

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