Nanoscale Compositional Characterization of Silicon Oxide-Nitride-Oxide Stacks

Igor Levin

doi:10.1017/S1431927602107768

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Nanoscale Compositional Characterization of Silicon Oxide-Nitride-Oxide Stacks

Published online by Cambridge University Press: 01 August 2002

Igor Levin

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Igor Levin*: Affiliation:
Ceramics Division, National Institute of Standards and Technology, Gaithersburg MD 20899

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Type: Abstract
Information: Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 1178 - 1179

DOI: https://doi.org/10.1017/S1431927602107768 [Opens in a new window]
Copyright: Copyright © Microscopy Society of America 2002

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Nanoscale Compositional Characterization of Silicon Oxide-Nitride-Oxide Stacks

Volume 8, Issue S02
Igor Levin ^(a1)
DOI: https://doi.org/10.1017/S1431927602107768

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Nanoscale Compositional Characterization of Silicon Oxide-Nitride-Oxide Stacks

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