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NanoMi Open Source (S)TEM Platform: Initial SEM Implementation

Published online by Cambridge University Press:  30 July 2021

Marek Malac
Affiliation:
National Research of Council, Alberta, Canada
Karan Kumar
Affiliation:
University of Alberta, United States
Darren Wen
Affiliation:
Dept. of Integrated Engineering, University of British Columbia,V6T 1Z4, Vancouver, Canada., United States
Jesus Alejandro Marin-Calzada
Affiliation:
Department of Physics, University of Alberta, T6G 2E1, Edmonton, Canada., United States
Martin Cloutier
Affiliation:
NRC-NANO, 11421 Saskatchewan Drive, T6G 2M9, Edmonton, Canada., United States
Mark Salomons
Affiliation:
NRC-NANO, 11421 Saskatchewan Drive, T6G 2M9, Edmonton, Canada., Edmonton, Alberta, Canada
Darren Homeniuk
Affiliation:
NRC-NANO, 11421 Saskatchewan Drive, T6G 2M9, Edmonton, Canada., United States
Sean Chen
Affiliation:
Department of Physics & Astronomy, 325 - 6224 Agricultural Rd., Vancouver, Canada., United States
Jason Pitters
Affiliation:
NRC-NANO, 11421 Saskatchewan Drive, T6G 2M9, Edmonton, Canada., United States
Doug Vick
Affiliation:
NRC-NANO, 11421 Saskatchewan Drive, T6G 2M9, Edmonton, Canada., United States
Drew Price
Affiliation:
NRC-NANO, 11421 Saskatchewan Drive, T6G 2M9, Edmonton, Canada., United States
Misa Hayashida
Affiliation:
National Research of Council, Edmonton, Alberta, Canada
Ray Egerton
Affiliation:
Department of Physics, University of Alberta, T6G 2E1, Edmonton, Canada., United States

Abstract

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Type
Advances in Analytical STEM-in-SEM
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Malac, M. et al. Micr. and Microanal. 26 (S2) (2020), p. 1810-1811.CrossRefGoogle Scholar
Rempfer, G., J. Appl. Phys. 57 (1985), p. 2385.CrossRefGoogle Scholar
nanomi.org and https://osf.io/bpj73, DOI: 10.17605/OSF.IO/BPJ73CrossRefGoogle Scholar