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Multiple Double XTEM Sample Preparation of Sub-10 nm Diameter Si Nanowires

Published online by Cambridge University Press:  01 August 2010

L Gignac ,
S Mittal ,
S Bansaruntip ,
G Cohen  and
J Sleight
L Gignac
Affiliation:
IBM Research
S Mittal
Affiliation:
IBM Research
S Bansaruntip
Affiliation:
IBM Research
G Cohen
Affiliation:
IBM Research
J Sleight
Affiliation:
IBM Research

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 168 - 169
Copyright
Copyright © Microscopy Society of America 2010