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Monte Carlo Simulation of Spatial Resolution for Electron Backscattered Diffraction (EBSD) with Application to Two-Phase Materials

Published online by Cambridge University Press:  02 July 2020

S. X. Ren ,
E. A. Kenik  and
K. B. Alexander
S. X. Ren
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, TN, 37831
E. A. Kenik
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, TN, 37831
K. B. Alexander
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, TN, 37831
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The study of texture and grain boundary misorientation in multiphase materials has been greatly benefited from the recent automation of the electron back-scattered diffraction (EBSD) technique. With this technique, each phase in a multiphase material can be individually sampled and analyzed. This is of great significance and interest in the study of thin films, inclusions and multiphase alloys. Spatial resolution, which depends on experimental conditions such as beam energy and specimen tilt, and the material being studied, is critical in order to determine the orientation of different phases in multiphase materials.

The Monte Carlo (MC) method has been effectively used to investigate spatial resolution in single phase materials. In this paper, the MC simulation is modified and applied to two-phase geometries. For a bulk two phase (Al/Au) specimen, the coordinate system was defined such that the x-axis was normal to the electron beam and the interface, y-axis parallel to the interface and coplanar to the beam direction, and z-axis perpendicular to the specimen surface which was tilted 70°, as shown in Fig. 1.

Type
Materials Science Applications of Microdiffraction Methods in the SEM
Information
Microscopy and Microanalysis , Volume 3 , Issue S2: Proceedings: Microscopy & Microanalysis '97, Microscopy Society of America 55th Annual Meeting, Microbeam Analysis Society 31st Annual Meeting, Histochemical Society 48th Annual Meeting, Cleveland, Ohio, August 10-14, 1997 , August 1997 , pp. 575 - 576
Copyright
Copyright © Microscopy Society of America 1997

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References

Rändle, V., Microtexture determination and its applications, Bournemouth: Bourne Press (1992) 162.Google Scholar
Ren, S.X.et al., submitted to Microscopy and Microanalysis, March 1997.Google Scholar
This research was sponsored by the Division of Materials Sciences, U. S. Department of Energy, under contract DE-AC05-96OR22464 with Lockheed Martin Energy Research Corp.. The authors wish to thank Dr. D. C. Joy for his source code and adviceGoogle Scholar