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Monitoring Contamination Rate in an SEM Equipped with an Evactron Anti-Contamination Device

Published online by Cambridge University Press:  31 July 2006

R Garcia ,
AD Batchelor ,
CB Mooney ,
AD Garetto ,
M Rothwell ,
VL Carlino ,
R Vane  and
PE Russell
R Garcia
Affiliation:
NC State University
AD Batchelor
Affiliation:
NC State University
CB Mooney
Affiliation:
NC State University
AD Garetto
Affiliation:
NC State University
M Rothwell
Affiliation:
NC State University
VL Carlino
Affiliation:
XEI Scientific
R Vane
Affiliation:
XEI Scientific
PE Russell
Affiliation:
NC State University
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 204 - 205
Copyright
© 2006 Microscopy Society of America

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