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Modeling SEM Column, Probe Formation, and Imaging Using Fourier Optics

Published online by Cambridge University Press:  30 July 2021

Surya Kamal  and
Richard Hailstone
Surya Kamal
Affiliation:
Rochester Institute of Technology, United States
Richard Hailstone
Affiliation:
Rochester Institute of Technology, United States

Abstract

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Type
Exploring Beam-sample Interactions for Uncovering the Atomic or Dynamic Nature of Matter
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 3336 - 3337
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Ximen, J., Shao, Z., Lin, P.S.D., Journal of Microscopy, Vol. 170. Pt 2, May 1993, p. 119-124.CrossRefGoogle Scholar
Reimer, L. (1998) Electron Optics of a Scanning Electron Microscope. In: Scanning Electron Microscopy. Springer Series in Optical Sciences, vol 45.CrossRefGoogle Scholar
Orloff, J. (Ed.). (2009) Chapter 8. In: Handbook of Charged Particle Optics (2nd ed.)Google Scholar
Zotta, M., Nevins, M., et al. Microscopy and Microanalysis, 24(4) (2018), p. 396-405CrossRefGoogle Scholar