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Minute foreign materials analysis using mono-capillary with 10-micrometer spatial resolution

Published online by Cambridge University Press:  31 July 2006

S Ohzawa
Affiliation:
Horiba Ltd., Japan
Y Yokota
Affiliation:
Horiba Ltd., Japan
D Matsunaga
Affiliation:
Horiba Ltd., Japan
S Komatani
Affiliation:
Horiba Ltd., Japan
K Obori
Affiliation:
Horiba Ltd., Japan
A Whitley
Affiliation:
Horiba Jobin Yvon Inc., Japan
S Mamedov
Affiliation:
Horiba Jobin Yvon Inc., Japan

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Abstract
Copyright
© 2006 Microscopy Society of America