Hostname: page-component-78c5997874-j824f Total loading time: 0 Render date: 2024-11-19T14:50:52.846Z Has data issue: false hasContentIssue false
  • English
  • Français

Microstructure of Thick Polycrystalline Silicon Films for MEMS Application

Published online by Cambridge University Press:  01 August 2002

H.W. Zhou ,
B.G. Kharas  and
P.I. Gouma
H.W. Zhou
Affiliation:
Dept. of Materials Science and Engineering, State University of New York at Stony Brook, NY 11794
B.G. Kharas
Affiliation:
Standard MEMS, Inc., 35 Marcus Boulevard, Hauppauge, NY 11788
P.I. Gouma
Affiliation:
Dept. of Materials Science and Engineering, State University of New York at Stony Brook, NY 11794

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 666 - 667
Copyright
Copyright © Microscopy Society of America 2002