The carbides and nitrides of transition metals, are excellent candidates for hard coatings for tribological applications. Recently a novel pulsed laser deposition (PLD) technique has been developed for the room temperature growth of particulate free titanium carbide (TiC) coatings on bearing steels. On a completely different scale from ball bearing applications, moving microelectricalmechanical systems (MEMS) face issues of limited lifetime as a result of rapid wear of the silicon components. The integration of hard tribological coatings into moving MEMS structures should greatly increase the functional lifetime of these devices. The same PLD technique has been used to deposit TiC thin film onto MEMS test structures consisting of multilayer coatings on Si substrates, and patterned 3-D Si substrates. This procedure for growing TiC appears to be compatible with conventional MEMS fabrication procedures.