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Microscopy Studies of Carbon Nanotubes/Ferroelectric Composites for Microelectronics

Published online by Cambridge University Press:  28 September 2012

Amit Mahajan
Affiliation:
Department of Ceramics and Glass Engineering, CICECO, University of Aveiro, 3810-193 Aveiro, Portugal
Rubaiyet Iftekharul Haque
Affiliation:
Department of Ceramics and Glass Engineering, CICECO, University of Aveiro, 3810-193 Aveiro, Portugal
Paula M. Vilarinho
Affiliation:
Department of Ceramics and Glass Engineering, CICECO, University of Aveiro, 3810-193 Aveiro, Portugal
Angus Kingon
Affiliation:
Division of Engineering, Brown University, Providence, Rhode Island 02912, USA

Abstract

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Top-down approaches for continuous scaling-down of devices and components in semiconductor industries is getting increasingly difficult and expensive, and thus bottom–up strategies, e.g., growth of functional nano-structures using nanowires or nanotubes are being explored rather than patterning and etching. Carbon nanotubes (CNTs) are an interesting option under consideration due to their extraordinary physical and electrical properties that make them suitable for microelectronic applications, such as, semiconductor field-effect-transistors (FET) and capacitors. In recent years, the fabrication of one-dimension (1D) ferroelectric (FE) nanostructures have been investigated as a capacitor for future 3D memories, however several difficulties need to be overcome in particular fabrication and characterization. In this work, the fabrication of ferroelectrics (FE) (e.g., Pb1-xZrxTiO3 (PZT) and BaTiO3 (BT)) multi-walled carbon nanotubes (MWCNTs) composites were synthesised by chemical solution deposition (CSD) method, namely sol gel. Later, the composites were investigated using scanning electron microscope (SEM) equipped with energy dispersive spectroscopy facilities and transmission electron microscopy (TEM) in addition to X Ray Diffraction (XRD) and Fourier Transform Infrared (FTIR), to address the compatibility between FE and CNTs.

Type
Materials Sciences
Copyright
Copyright © Microscopy Society of America 2012