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Methods of the electron induced cleanning in SEM

Published online by Cambridge University Press:  30 July 2021

Ilona Müllerová ,
Ivo Konvalina  and
Eliška Materna Mikmeková
Ilona Müllerová
Affiliation:
Institute of Scientific Instruments of the Czech Academy of Sciences, Brno, Czech Republic
Ivo Konvalina
Affiliation:
Institute of Scientifics Instruments of the Czech Academy of Sciences, Brno, Czech Republic
Eliška Materna Mikmeková
Affiliation:
Institute of Scientific Instruments of the Czech Academy of Sciences, Brno, Czech Republic

Abstract

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Type
Advances in Analytical STEM-in-SEM
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 2016 - 2017
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Müllerová, I, et al. : Microsc. Microanal. 21 (Suppl 3), 2015CrossRefGoogle Scholar
Müllerová, I and Frank, L, Advanced in Imaging and Electron Physics 128 (2003) p. 309CrossRefGoogle Scholar
Materna Mikmeková, E, et al. : Journal of Electron Spectroscopy and Related Phenomena 241 (2020) 146873Google Scholar
The authors acknowledge the funding from the Technology Agency of the Czech Republic, no: TN01000008.Google Scholar