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A Method for Plan-View FIB Liftout of Near Surface Defects with Minimal Beam-Induced Damage

Published online by Cambridge University Press:  01 August 2018

Warren L. York ,
Douglas L. Medlin ,
Joshua D. Sugar  and
Philip Noell
Warren L. York
Affiliation:
Sandia National Laboratories, Livermore, CA.
Douglas L. Medlin
Affiliation:
Sandia National Laboratories, Livermore, CA.
Joshua D. Sugar
Affiliation:
Sandia National Laboratories, Livermore, CA.
Philip Noell
Affiliation:
Sandia National Laboratories, Albuquerque, NM.

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 842 - 843
Copyright
© Microscopy Society of America 2018 

References

[1] Giannuzzi, L.A. Stevie, F.A. Micron 30(3 1999) p. 197.Google Scholar
[2] Chen Li, , et al, Ultramicroscopy 184(A 2018) p. 310.Google Scholar
[3] Sandia National Laboratories is a multimission laboratory managed and operated by National Technology and Engineering Solutions of Sandia LLC, a wholly owned subsidiary of Honeywell International Inc., for the U.S. Department of Energy's National Nuclear Security Administration under contract DE-NA0003525.Google Scholar