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A Method For In-Situ Measurement Of The Film Thickness And Composition Of Films Deposited by Gas Injection In The FIB-SEM

Published online by Cambridge University Press:  23 November 2012

C. Lang ,
S. Burgess ,
G. Kerr ,
P. Statham ,
C. Hartfield  and
R. Stierman
C. Lang
Affiliation:
Oxford Instruments, High Wycombe, United Kingdom
S. Burgess
Affiliation:
Oxford Instruments, High Wycombe, United Kingdom
G. Kerr
Affiliation:
Oxford Instruments, High Wycombe, United Kingdom
P. Statham
Affiliation:
Oxford Instruments, High Wycombe, United Kingdom
C. Hartfield
Affiliation:
Omniprobe, Dallas, TX
R. Stierman
Affiliation:
Omniprobe, Dallas, TX
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 620 - 621
Copyright
Copyright © Microscopy Society of America 2012

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