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Method for Cross-sectional Transmission Electron Microscopy Specimen Preparation of Composite Materials Using a Dedicated Focused Ion Beam System

Published online by Cambridge University Press:  08 August 2002

Toshie Yaguchi ,
Takeo Kamino ,
Tohru Ishitani  and
Ryoichi Urao
Toshie Yaguchi
Affiliation:
School of Engineering, Ibaraki University, Japan Hitachi Science Systems, Japan
Takeo Kamino
Affiliation:
Hitachi Science Systems, Japan
Tohru Ishitani
Affiliation:
Instrument Division, Hitachi Ltd., Japan
Ryoichi Urao
Affiliation:
School of Engineering, Ibaraki University, Japan
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Abstract

A new method for transmission electron microscope (TEM) specimen preparation using a focused ion beam (FIB) system that results in a lower rate of gallium (Ga) implantation has been developed. The method was applied to structural and analytical studies of composite materials such as silicon (Si)-devices and magneto-optical disk. To protect the specimens against Ga ion irradiation, amorphous tungsten (W) was deposited on the surface of the specimen prior to FIB milling. The deposition was quite effective in reducing the Ga implantation rate, and energy-dispersive X-ray (EDX) analysis of these specimens detected 0.3Ð1.5% Ga incorporated in the thinned area. FIB milling times for these specimens were 1.5Ð2 hr. Although the milling rate was high, all the materials were properly prepared for TEM study, and clear crystal lattice images were observed on all specimens.

Type
Articles
Information
Microscopy and Microanalysis , Volume 5 , Issue 5 , September 1999 , pp. 365 - 370
Copyright
© 1999 Microscopy Society of America

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