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Measurements of Porous Networks in Low-k Dielectric by Three-dimensional Electron Tomography

Published online by Cambridge University Press:  26 July 2009

P Ercius ,
HL Xin  and
DA Muller
P Ercius
Affiliation:
Cornell University
HL Xin
Affiliation:
Cornell University
DA Muller
Affiliation:
Cornell University

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 1240 - 1241
Copyright
Copyright © Microscopy Society of America 2009