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Measurement of Nanograin Orientations: Application to Cu Interconnects and Nanoparticle Phase Identification

Published online by Cambridge University Press:  08 April 2017

G Brunetti ,
J Rouvière ,
R Galand ,
L Clément ,
C Cayron ,
E Rauch ,
D Robert ,
J Martin ,
F Bertin  and
A Chabli
G Brunetti
Affiliation:
CEA Grenoble, France
J Rouvière
Affiliation:
CEA Grenoble, France
R Galand
Affiliation:
STMicroelectronics, France
L Clément
Affiliation:
STMicroelectronics, France
C Cayron
Affiliation:
CEA Grenoble, France
E Rauch
Affiliation:
Université de Grenoble, France
D Robert
Affiliation:
CEA Grenoble, France
J Martin
Affiliation:
CEA Grenoble, France
F Bertin
Affiliation:
CEA Grenoble, France
A Chabli
Affiliation:
CEA Grenoble, France

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 1094 - 1095
Copyright
Copyright © Microscopy Society of America 2011