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Materials Selection for Ultra-Thin Diamond-Like Carbon Film Metrology and Structural Characterization by TEM

Published online by Cambridge University Press:  23 September 2015

Guilherme P. Souza ,
Kurt C. Ruthe ,
Lifan Chen ,
Liang Hong  and
Haifeng Wang
Guilherme P. Souza
Affiliation:
Western Digital Corporation, Magnetic Heads Operations, Metrology & Materials Characterization, Ayutthaya, Thailand, 13160
Kurt C. Ruthe
Affiliation:
Western Digital Corporation, Magnetic Heads Operations, Metrology & Materials Characterization, Ayutthaya, Thailand, 13160
Lifan Chen
Affiliation:
Western Digital Corporation, Magnetic Heads Operations, Materials Characterization, Fremont, CA, USA, 94539
Liang Hong
Affiliation:
Western Digital Corporation, Magnetic Heads Operations, Materials Characterization, Fremont, CA, USA, 94539
Haifeng Wang
Affiliation:
Western Digital Corporation, Magnetic Heads Operations, Materials Characterization, Fremont, CA, USA, 94539

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 827 - 828
Copyright
Copyright © Microscopy Society of America 2015 

References

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[3] Fan, X, et al, Appl. Phys. Lett. 75–18 (1999). p 2740.Google Scholar