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Mapping of Process Induced Dopant Redistributions by Electron Holography

Published online by Cambridge University Press:  01 August 2002

Wolf-Dieter Rau  and
Alexander Orchowski
Wolf-Dieter Rau
Affiliation:
LEO Electron Microscopy, Carl-Zeiss-Str 56, D-73447 Oberkochen, Germany[3]
Alexander Orchowski
Affiliation:
LEO Electron Microscopy, Carl-Zeiss-Str 56, D-73447 Oberkochen, Germany[3]

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 36 - 37
Copyright
Copyright © Microscopy Society of America 2002