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Low-Energy Argon Broad Ion Beam and Narrow Ion Beam Milling of In Situ Lift-Out FIB Specimens

Published online by Cambridge University Press:  01 August 2018

M.J. Campin
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA, USA
C.S. Bonifacio
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA, USA
P.E. Fischione
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA, USA

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2018 

References

[1] Giannuzzi, LA Stevie, FA Micron 30 1999) p. 197.Google Scholar
[2] Mayer, J, et al., MRS Bulletin 30 2007) p. 400.Google Scholar
[3] Kelley, R, et al., Microscopy and Microanalysis 19(Suppl 2 2013) p. 862.Google Scholar
[4] Giannuzzi, LA, et al., Microscopy and Microanalysis 11(Suppl. 2 2005) p. 828.Google Scholar
[5] Schaffer, M, et al., Ultramicroscopy 114 2012) p. 62.Google Scholar
[6] Mitome, M Journal of Electron Microscopy 62(2 2013) p. 321.Google Scholar
[7] Nowakowski, P, et al., Microscopy and Microanalysis 23(Suppl. 2 2017) p. 300.Google Scholar