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Low-Cost Nanomanipulator for In Situ Experiments in a SEM

Published online by Cambridge University Press:  30 May 2006

Denise Nakabayashi ,
Paulo C. Silva ,
Juan C. González ,
Varlei Rodrigues  and
Daniel Ugarte
Denise Nakabayashi
Affiliation:
Laboratório Nacional de Luz Síncrotron, C.P. 6192, 13084-971, Campinas, SP, Brazil Instituto de Física Gleb Wataghin, Universidade Estadual de Campinas, C.P. 6165, 13081–970, Campinas, SP, Brazil
Paulo C. Silva
Affiliation:
Laboratório Nacional de Luz Síncrotron, C.P. 6192, 13084-971, Campinas, SP, Brazil
Juan C. González
Affiliation:
Laboratório Nacional de Luz Síncrotron, C.P. 6192, 13084-971, Campinas, SP, Brazil
Varlei Rodrigues
Affiliation:
Laboratório Nacional de Luz Síncrotron, C.P. 6192, 13084-971, Campinas, SP, Brazil Instituto de Física Gleb Wataghin, Universidade Estadual de Campinas, C.P. 6165, 13081–970, Campinas, SP, Brazil
Daniel Ugarte
Affiliation:
Laboratório Nacional de Luz Síncrotron, C.P. 6192, 13084-971, Campinas, SP, Brazil Instituto de Física Gleb Wataghin, Universidade Estadual de Campinas, C.P. 6165, 13081–970, Campinas, SP, Brazil
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Abstract

Here, we describe the development of an inexpensive and versatile manipulation system for in situ experiments in a field emission scanning electron microscope based on a parallel-guiding plate-spring mechanism and low cost materials. The system has been tested for a wide range of applications, such as collecting, moving, and positioning particles, fabricating atomic force microscopy tips based on carbon nanotubes, and characterizing individual nanobjects. The nanomanipulation results demonstrate that there are many opportunities for the use of physical manipulation in the bottom-up approach to fabrication of nanodevices.

Keywords

nanomanipulatorscanning electron microscopenanosystems
Type
INSTRUMENTATION AND TECHNIQUE
Information
Microscopy and Microanalysis , Volume 12 , Issue 4 , August 2006 , pp. 311 - 316
Copyright
© 2006 Microscopy Society of America

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