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Low Energy STEM of Multi-Layers and Dopant Profiles

Published online by Cambridge University Press:  06 August 2003

P. G. Merli ,
A. Migliori ,
V. Morandi  and
S. Tundo
P. G. Merli
Affiliation:
CNR-IMM Sezione di Bologna, Via Gobetti 101, 40129 Bologna, Italy
A. Migliori
Affiliation:
CNR-IMM Sezione di Bologna, Via Gobetti 101, 40129 Bologna, Italy
V. Morandi
Affiliation:
CNR-IMM Sezione di Bologna, Via Gobetti 101, 40129 Bologna, Italy
S. Tundo
Affiliation:
CNR-IMM Sezione di Lecce, Via per Arnesano, 73100 Lecce, Italy

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 142 - 143
Copyright
Copyright © Microscopy Society of America 2003