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Light Ion Beams Interacting with Thin Films

Published online by Cambridge University Press:  05 August 2019

Deying Xia  and
John Notte
Deying Xia
Affiliation:
Carl Zeiss SMT, Inc., PCS Integration Center, Peabody, MA, USA.
John Notte*
Affiliation:
Carl Zeiss SMT, Inc., PCS Integration Center, Peabody, MA, USA.
*
*Corresponding author: [email protected]

Abstract

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Type
Advances in Focused Ion Beam Instrumentation and Techniques
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 906 - 907
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Semple, M, Baladi, E, and Iyer, AK, IEEE Selected Topics in Quantum Electronics (2019) (accepted for publication).Google Scholar
[2]Xia, , et al. , Nanoscale 10 (2018), p. 5198.Google Scholar
[3]Nakaharai, , et al. , IEEE Tansactions on Nanotechnology 13 (2014), p. 1039.Google Scholar
[4]Kasaei, L, et al. , AIP Advances 8 (2018), p. 075020.Google Scholar
[5]Beyer, A and Beilstein, , J. Nanotechnol. 6 (2015), p. 1712.Google Scholar
[6]Arora, WJ, et al. , J. Vac. Sci. Technol. B 25 (2007), p. 2184.Google Scholar
[7]Liu et, Z. al., Sci. Adv. 4 (2018), p. eeat4436.Google Scholar