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LA-WATAP and SIMS as Complementary Techniques for Quantitative Measurement of Nnanometer Structures

Published online by Cambridge University Press:  03 August 2008

L Renaud ,
I Martin ,
A Merkulov ,
P Peres ,
R Benbalagh  and
M Schuhmacher
L Renaud
Affiliation:
CAMECA, France
I Martin
Affiliation:
CAMECA, France
A Merkulov
Affiliation:
CAMECA, France
P Peres
Affiliation:
CAMECA, France
R Benbalagh
Affiliation:
CAMECA, France
M Schuhmacher
Affiliation:
CAMECA, France
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 1242 - 1243
Copyright
© 2008 Microscopy Society of America

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