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Latest applications of ToF-SIMS characterization for next-generation electronic materials

Published online by Cambridge University Press:  22 July 2022

Tanguy Terlier*
Affiliation:
SIMS laboratory, Shared Equipment Authority, Rice University, Houston, TX 77005, USA
Qing Ai
Affiliation:
Department of Materials Science and Nano Engineering, Rice University, Houston, TX 77005, USA
Siraj Sidhik
Affiliation:
Department of Chemical and Biomolecular Engineering, Rice University, Houston, TX 77005, USA
Aditya Mohite
Affiliation:
Department of Chemical and Biomolecular Engineering, Rice University, Houston, TX 77005, USA
Yan Yao
Affiliation:
Department of Electrical and Computer Engineering, University of Houston, Houston, TX 77204, USA
Ming Tang
Affiliation:
Department of Materials Science and Nano Engineering, Rice University, Houston, TX 77005, USA
Jun Lou
Affiliation:
Department of Materials Science and Nano Engineering, Rice University, Houston, TX 77005, USA
*
*Corresponding author: [email protected]

Abstract

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Type
On Demand - Surface and Subsurface Microscopy and Microanalysis of Physical and Biological Specimens
Copyright
Copyright © Microscopy Society of America 2022

References

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