Over the last few years, considerable efforts have been made in developing fabrication processes for thick superconducting YBa2Cu3O7-δ film on a metallic substrate for electric power applications. Since these applications require the composite tape to be longer than 4-500m, any methods chosen need to be compatible with such length requirement. One possible approach is the so-called BaF2 process which involves deposition of a unreacted mixture of a BaF2-Y-Cu-O layer on a substrate by an electron beam evaporation method, followed by heat-treatment of the layer in a mixed-gas atmosphere of a low partial pressure O2, saturated H2O, and N2. Although it was shown previously that c-axis aligned films up to ∼ I m long can be produced under these conditions it is uncertain how thick the films can be made and this is of crucial importance as most applications require film thickness to be greater than ∼5μm to carry a large, dissipationless current.