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Iterative Autofocus Algorithms for Scanning Electron Microscopy

Published online by Cambridge University Press:  26 July 2009

M Rudnaya ,
RMM Mattheij  and
JML Maubach
M Rudnaya
Affiliation:
Eindhoven University of Technology,Netherlands
RMM Mattheij
Affiliation:
Eindhoven University of Technology,Netherlands
JML Maubach
Affiliation:
Eindhoven University of Technology,Netherlands

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 1108 - 1109
Copyright
Copyright © Microscopy Society of America 2009