Hostname: page-component-586b7cd67f-r5fsc Total loading time: 0 Render date: 2024-11-27T02:25:13.825Z Has data issue: false hasContentIssue false
  • English
  • Français

Ion-Irradiated Damage in Semiconductors Visualized by Means of Low-kV Scanning Electron Microscopy

Published online by Cambridge University Press:  05 August 2019

Iwona Jozwik ,
Adam Barcz ,
Ewa Dumiszewska  and
Elzbieta Dabrowska
Iwona Jozwik
Affiliation:
Institute of Electronic Materials Technology, Warsaw, Poland National Centre for Nuclear Research, NOMATEN Centre of Excellence, Swierk-Otwock, Poland
Adam Barcz
Affiliation:
Institute of Electron Technology/Institute of Physics PAS, Warsaw, Poland
Ewa Dumiszewska
Affiliation:
Institute of Electronic Materials Technology, Warsaw, Poland
Elzbieta Dabrowska
Affiliation:
Institute of Electronic Materials Technology, Warsaw, Poland

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Low Voltage, Low Energy Electron Microscopy Imaging and Analysis
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 486 - 487
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Gomati, M M and Wells, T C R, Appl. Phys. Lett. 79 (2001), p. 2931.Google Scholar
[2]Merli, P G et al. , Appl. Phys. Lett. 86 (2005), p. 101916.Google Scholar
[3]Jóźwik, I et al. , ECS J. Solid State Sci. Technol. 6(7) (2017), p. 415.Google Scholar
[4]Patterson, O D et al. , Proceedings of The 17th Annual SEMI/IEEE ASMC 2006 Conference, doi:10.1109/ASMC.2006.1638778.Google Scholar
[5]Rosenkranz, R, J Mater Sci: Mater Electron 22 (2011), p.1523.Google Scholar
[6]Brudnyi, V N and Krivov, M A, Soviet Physics Journal 23 (1980), p. 45.Google Scholar
[7]Pearton, S J, Mater. Sci. Rep. 4 (1990), p. 313.Google Scholar
[8]The authors acknowledge funding from the National Science Centre, Poland, Grant Number 2017/27/B/ST8/01158.Google Scholar