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Investigation of Phase Transformations in Ge4Sb4Te5 film using Transmission Electron Microscopy

Published online by Cambridge University Press:  30 July 2021

Manish Singh ,
Chanchal Ghosh ,
Paul Kotula ,
Benjamin Miller ,
John Watt ,
Helena Silva  and
C. Barry Carter
Manish Singh
Affiliation:
University of Connecticut, Connecticut, United States
Chanchal Ghosh
Affiliation:
University of Connecticut, Connecticut, United States
Paul Kotula
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico, United States
Benjamin Miller
Affiliation:
Gatan Inc., California, United States
John Watt
Affiliation:
Los Alamos National Laboratory, Connecticut, United States
Helena Silva
Affiliation:
University of Connecticut, Connecticut, United States
C. Barry Carter
Affiliation:
University of Connecticut, Connecticut, United States

Abstract

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Type
Investigating Phase Transitions in Functional Materials and Devices by In Situ/Operando TEM
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 1240 - 1242
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Ghosh, C., Singh, M.K., Watt, J., Silva, H. & Carter, C.B. (2020). Defect Imaging and Structure Evolution in GST Films During In-situ Heating. Microscopy and Microanalysis 26(S2), 1396-1398.CrossRefGoogle Scholar
Singh, M.K., Ghosh, C., Kotula, P., Watt, J., Silva, H. & Carter, C.B. (2020a). Direct Observation of Phase Transformations in Ge-Sb-Te Materials. Microscopy and Microanalysis 26(S2), 1418-1420.CrossRefGoogle Scholar
Singh, M.K., Ghosh, C., Miller, B., Kotula, P.G., Tripathi, S., Watt, J., Bakan, G., Silva, H. & Carter, C.B. (2020b). In situ TEM study of crystallization and chemical changes in an oxidized uncapped Ge2Sb2Te5 film. J Appl Phys 128(12), 124505.CrossRefGoogle Scholar
Tripathi, S., Kotula, P., Singh, M.K., Ghosh, C., Bakan, G., Silva, H. & Carter, C.B. (2020). Role of Oxygen on Chemical Segregation in Uncapped Ge2Sb2Te5 Thin Films on Silicon Nitride. Ecs J Solid State Sc 9(5), 054007.CrossRefGoogle Scholar
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