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Investigation of Multiple, Large Area EDS Detectors on an SEM Capable of Various Mounting Geometries for Optimal EDS Analysis

Published online by Cambridge University Press:  27 August 2014

D. Edwards ,
N. Rowlands ,
D. Guarrera ,
N. Erdman ,
V. Robertson  and
R. McLaughlin
D. Edwards
Affiliation:
JEOL, USA Inc., 11 Dearborn Rd, Peabody, MA 01960
N. Rowlands
Affiliation:
Oxford Instruments, Suite 150, 300 Baker Ave., Concord, MA 01742
D. Guarrera
Affiliation:
JEOL, USA Inc., 11 Dearborn Rd, Peabody, MA 01960
N. Erdman
Affiliation:
JEOL, USA Inc., 11 Dearborn Rd, Peabody, MA 01960
V. Robertson
Affiliation:
JEOL, USA Inc., 11 Dearborn Rd, Peabody, MA 01960
R. McLaughlin
Affiliation:
Oxford Instruments, Suite 150, 300 Baker Ave., Concord, MA 01742

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 646 - 647
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Newbury, D.E, Ritchie, N.W.M Journal of Analytical Atomic Spectrometry 28.7 (2013): 973-988.Google Scholar
[2] Bell, D.C. and Erdman, N. in Low Voltage Electron Microscopy: Principles and Applications (2012):1-30.Google Scholar
[3] Rowlands, N., et al., Microscopy and Microanalysis 15.S2 (2009): 548-54.Google Scholar