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Integration of Functional Epitaxial Oxides into Silicon: A TEM Investigation

Published online by Cambridge University Press:  07 September 2007

E Bugiel ,
A Fissel ,
M Czernohorsky ,
A Laha  and
H J Osten
E Bugiel
Affiliation:
Leibniz University of Hannover,Germany
A Fissel
Affiliation:
Leibniz University of Hannover,Germany
M Czernohorsky
Affiliation:
Leibniz University of Hannover,Germany
A Laha
Affiliation:
Leibniz University of Hannover,Germany
H J Osten
Affiliation:
Leibniz University of Hannover,Germany
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Extract

Extended abstract of a paper presented at MC 2007, 33rd DGE Conference in Saarbrücken, Germany, September 2 – September 7, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S03 , September 2007 , pp. 304 - 305
Copyright
Copyright © Microscopy Society of America 2007

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