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Integrated SIMS-AFM Instrument for Accurate High-Sensitivity and High-Resolution Chemical 3D Analysis

Published online by Cambridge University Press:  23 September 2015

Y. Fleming ,
T. Wirtz  and
S. Eswara Moorthy
Y. Fleming
Affiliation:
Advanced Instrumentation for Ion Nano-Analytics (AINA), Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg
T. Wirtz
Affiliation:
Advanced Instrumentation for Ion Nano-Analytics (AINA), Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg
S. Eswara Moorthy
Affiliation:
Advanced Instrumentation for Ion Nano-Analytics (AINA), Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1437 - 1438
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Fleming, Y., Wirtz, T., Gysin, U., Glatzel, T., Wegmann, U., Meyer, E., Maier, U. & Rychen, J., Appl. Surf. Sci 258(4), 1322–1327 (2011).CrossRefGoogle Scholar
[2] Wirtz, T., Fleming, Y., Gysin, U., Glatzel, T., Wegmann, U, Meyer, E., Maier, U. & Rychen, J., Surf Interface Anal 45(1), 513–516 (2013).Google Scholar
[3] Wirtz, T., Fleming, Y., Gerard, M., Gysin, U., Glatzel, T., Meyer, E., Wegmann, U., Maier, U., Odriozola, A. H. & Uehli, D., Rev. Sci. Instrum 83, 063702 (2012).CrossRefGoogle Scholar
[4] Nguyen, C. L., Wirtz, T., Fleming, Y. & Metson, J. B., Appl. Surf. Sci 265, 489–494 (2013).Google Scholar