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Insulator Analysis Using Combined FIB-SEM instrument with TOF-SIMS

Published online by Cambridge University Press:  27 August 2014

Libor Sedláček ,
Jolana Kološová ,
Jaroslav Jiruše  and
Fred A. Stevie
Libor Sedláček
Affiliation:
TESCAN Brno, s.r.o., Libušina třída 1, 63500 Brno, Czech Republic
Jolana Kološová
Affiliation:
TESCAN Brno, s.r.o., Libušina třída 1, 63500 Brno, Czech Republic
Jaroslav Jiruše
Affiliation:
TESCAN Brno, s.r.o., Libušina třída 1, 63500 Brno, Czech Republic
Fred A. Stevie
Affiliation:
North Carolina State University, 2410 Campus Shore Drive, Raleigh, NC 27695, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 306 - 307
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Whitby, J. A., Ostlund, F., Horvath, P., Gabureac, M., Riesterer, J. L., Utke, I., Hohl, M., Sedlacek, L., Jiruse, J., Friedli, V., Bechelany, M., Michler, J. Advances in Materials Science and Engineering 2012). (2012), article ID 180437.Google Scholar
[2] Stevie, F.A. in “Introduction to Focused Ion Beams: Theory, Instrumentation, Applications, and Practice”, ed. L.A. Giannuzzi and F.A. Stevie, (Springer, NY 2005).Google Scholar
[3] Jiruse, J., Hrncir, T., Lopour, F., Zadrazil, M., Delobe, A.and Salord, O. Microscopy and Microanalysis 18 (Suppl. 2 2012), pp. 652-653, doi:10.1017/S1431927612005119.Google Scholar
[4] Hrncir, T., Lopour, F., Zadrazil, M., Delobbe, A., Salord, O., Sudraud, P. ISTFA 2012: Conference Proceedings from the 38th International Symposium for Testing and Failure Analysis, November 11-15, 2012, Phoenix, Arizona, USA 2012), pp.26-29.Google Scholar
[5] Stevie, F. A., Sedlacek, L., Babor, P., Jiruse, J., Principe, E., Klosova, K. Surf. Int. Anal. (in press). [6] The research leading to these results has received funding from the European Union Seventh Framework Program [FP7/2007-2013] under grant agreement n°280566, project UnivSEM.Google Scholar